A micro lens material layer 212, also known as a Middle UltraViolet (MUV) photoresist material layer 212, is then deposited over the DUV photoresist material layer 211. TSMC, one of the biggest IC foundries in the world announced volume production of CMOS sensors. Concentration efficiency varies according to the curvature. All rights reserved. As disclosed in FIG. Thus, the semiconductor structure P100 is well cleaned and adequately prepared for the following fabrication processes of the CMOS image sensor. 2A, an interlayer insulating film 201 is formed over a semiconductor substrate 200. 1, a photodiode 12, an interlayer insulation layer 13, and a color filter layer 14, and a planarization layer 15 are sequentially formed on a substrate 11. A blue color filter layer 107, a green color filter layer 108, and a red color filter layer 109 are subsequently formed on the first planarization layer 106. In one embodiment, the ratio of HF to EG is about 1:20 to about 1:50 in the first cleaning solution of the first treatment S11. Firstly, a substrate is provided. Typically, a CIS is classified according to the number of the transistors in a pixel. chemical mechanical polishing (CMP) in semiconductor manufacturing. An interlayer insulation layer 103 can be formed on an entire surface of the semiconductor substrate 101. The second treatment S12 is optional and is performed in cases where particles/residues is found to be remaining on the surface after the first treatment S11. On the other hand, a conventional image sensor causes distortion when taking images of a fast-moving object. 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